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This Ternary table has been manufactured for a sputtering system to be used by a research group in Germany as well as one at Dalhousie University.
A magnetron sputtering system modified to produce ternary films has been used to map large portions of the ternary phase diagram for the Si–Al–Sn system. (Publication 3). This system is unconventional because the stoichiometries of the elements sputtered on the substrates vary linearly with position and in an orthogonal manner.